Research on ion implantation in MEMS device fabrication by...

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International Journal of Modern Physics B 2018 / 03

Research on ion implantation in MEMS device fabrication by theory, simulation and experiments

Bai, Minyu, Zhao, Yulong, Jiao, Binbin, Zhu, Lingjian, Zhang, Guodong, Wang, Lei
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Language:
english
Journal:
International Journal of Modern Physics B
DOI:
10.1142/S0217979218501709
Date:
March, 2018
File:
PDF, 1.94 MB
english, 2018
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