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The role of thermal processes and target evaporation in formation of self-sputtering mode for copper magnetron sputtering
Bleykher, G.A., Yuryeva, A.V., Shabunin, A.S., Krivobokov, V.P., Sidelev, D.V.Volume:
152
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2018.03.020
Date:
June, 2018
File:
PDF, 1.05 MB
english, 2018