[ASCE CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY - Gaithersburg, Maryland (USA) (23-27 March 1998)] The 1998 international conference on characterization and metrology for ULSI technology -
Chowdhury, Ashfaqul I., Klein, Tonya M., Parsons, Gregory N.Year:
1998
Language:
english
DOI:
10.1063/1.56820
File:
PDF, 422 KB
english, 1998