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Modelling and analysis of the stress distribution in a multi-thin film system Pt/USG/Si
YAO, Wei-Zhen, Roqueta, Fabrice, CRAVEUR, Jean-Charles, BELHENINI, Soufyane, GARDES, Pascal, Tougui, AbdellahLanguage:
english
Journal:
Materials Research Express
DOI:
10.1088/2053-1591/aaba4b
Date:
March, 2018
File:
PDF, 1.28 MB
english, 2018