Control of Dual Frequency Capacitively Coupled Plasma via...

The European Physical Journal Applied Physics 2017 / 10 Vol. 80; Iss. 1

Control of Dual Frequency Capacitively Coupled Plasma via blocking capacitor and phase angle

Boudghene Stambouli, Arslane, Benallal, Rafik, Oudini, Nourredine, Mesli, Sidi Mohamed, Tadjine, Rabah
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Volume:
80
Language:
english
Journal:
The European Physical Journal Applied Physics
DOI:
10.1051/epjap/2017170180
Date:
October, 2017
File:
PDF, 580 KB
english, 2017
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