New design for inertial piezoelectric motors
Liu, Lige, Ge, Weifeng, Meng, Wenjie, Hou, Yubin, Zhang, Jing, Lu, QingyouVolume:
89
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.5008471
Date:
March, 2018
File:
PDF, 5.12 MB
english, 2018