Design and Analysis of MEMS based Piezoresistive Pressure sensor for Sensitivity Enhancement
Nallathambi, A., Shanmuganantham, T., Sindhanaiselvi, D.Volume:
5
Year:
2018
Language:
english
Journal:
Materials Today: Proceedings
DOI:
10.1016/j.matpr.2017.11.291
File:
PDF, 932 KB
english, 2018