Non-Destructive Characterization of Extended Crystalline...

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Nanoscale 2018

Non-Destructive Characterization of Extended Crystalline Defects in Confined Semiconductor Device Structures

Schulze, Andreas, Strakos, Libor, Vystavel, Tomas, Loo, Roger, Pacco, Antoine, Collaert, Nadine, Vandervorst, Wilfried, Caymax, M.
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Year:
2018
Language:
english
Journal:
Nanoscale
DOI:
10.1039/c8nr00186c
File:
PDF, 1.31 MB
english, 2018
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