Hemispherical cavities on silicon substrates: an overview...

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Materials Research Express 2018 / 03

Hemispherical cavities on silicon substrates: an overview of micro fabrication techniques

Poncelet, Olivier, Rasson, Jonathan, Tuyaerts, Romain, Coulombier, Michaël, Kotipalli, Ratan, Raskin, Jean-Pierre, Francis, Laurent A
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Language:
english
Journal:
Materials Research Express
DOI:
10.1088/2053-1591/aab907
Date:
March, 2018
File:
PDF, 19.20 MB
english, 2018
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