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[ASME ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems collocated with the ASME 2005 Heat Transfer Summer Conference - San Francisco, California, USA (July 17–22, 2005)] Advances in Electronic Packaging, Parts A, B, and C - Design and Driving Methodology of Out-of-Plane Electrostatic Microactuator With Extended Stable Motion Range
Fukushige, Takashi, Hata, Seiichi, Hayashi, Takehiko, Shimokohbe, AkiraYear:
2005
Language:
english
DOI:
10.1115/IPACK2005-73145
File:
PDF, 856 KB
english, 2005