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Novel design and performance of the solidly mounted resonator with an AlN-buffered ZnO piezoelectric film
Liu, Yijian, Li, Zhongli, Yang, Zhi, Su, Yanjie, Zhang, Yaozhong, Hwang, Huey-liang, Duan, Franklin, Zhang, YafeiLanguage:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2018.03.050
Date:
March, 2018
File:
PDF, 2.33 MB
english, 2018