ARCHIVE Proceedings of the Institution of Mechanical Engineers Part C Journal of Mechanical Engineering Science 1989-1996 (vols
2018 / 02
Prediction of residual clamping force for Coulomb type and Johnsen–Rahbek type of bipolar electrostatic chucks
Wang, Kesheng, Lu, Yijia, Cheng, Jia, Ji, LinhongLanguage:
english
Journal:
Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science
DOI:
10.1177/0954406218756938
Date:
February, 2018
File:
PDF, 1.03 MB
english, 2018