Forming Sub-45-nm High-Aspect Circle-Symmetric Spots with Double Bowtie Aperture Combined with Metal-Insulator-Metal Structure
Zheng, Jie, Chen, Weidong, Liu, Xianchao, Huang, Yuerong, Liu, Yunyue, Li, Ling, Xie, ZhengweiLanguage:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2018.03.224
Date:
March, 2018
File:
PDF, 1.02 MB
english, 2018