Novel high-frequency energy-efficient pulsed-dc generator for capacitively coupled plasma discharge
Mamun, Md Abdullah Al, Furuta, Hiroshi, Hatta, AkimitsuVolume:
89
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.5019970
Date:
March, 2018
File:
PDF, 2.85 MB
english, 2018