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Deposition and sensing properties of PT/PZT/PT thin films for microforce sensors
Cui, Yan, Meng, Hanbai, Wang, Jing, Dong, Weijie, Wang, LidingVolume:
T129
Language:
english
Journal:
Physica Scripta
DOI:
10.1088/0031-8949/2007/T129/047
Date:
December, 2007
File:
PDF, 870 KB
english, 2007