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Hydrogen Diffusion through Deformed Si-Si Bonds at Grain Boundaries in Hot-Wire CVD Polycrystalline Silicon Films
Rath, Jatindra K., Schropp, Ruud E.I., Beyer, W.Volume:
80-81
Year:
2001
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.80-81.109
File:
PDF, 437 KB
2001