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3D free forms in c-Si via grayscale lithography and RIE
Khazi, Isman, Muthiah, Uma, Mescheder, UlrichVolume:
193
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2018.02.006
Date:
June, 2018
File:
PDF, 2.18 MB
english, 2018