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Magnetron-like miniature ion source
Grzebyk, Tomasz, Szyszka, Piotr, Górecka-Drzazga, AnnaVolume:
151
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2018.01.048
Date:
May, 2018
File:
PDF, 2.57 MB
english, 2018