RF plasma generation in the chamber with the conducting...

EPJ Web of Conferences 2017 Vol. 157

RF plasma generation in the chamber with the conducting walls

Gavrikov, Andey, Kuzmichev, Sergey, Lizyakin, Gennadiy, Smirnov, Valentin, Timirkhanov, Rinat, Usmanov, Ravil, Vorona, Nazar, Hillairet, J.
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Volume:
157
Year:
2017
Language:
english
Journal:
EPJ Web of Conferences
DOI:
10.1051/epjconf/201715703062
File:
PDF, 382 KB
english, 2017
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