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[IEEE 2017 IEEE Conference on Control Technology and Applications (CCTA) - Mauna Lani Resort, HI, USA (2017.8.27-2017.8.30)] 2017 IEEE Conference on Control Technology and Applications (CCTA) - Predictive-model-based MIMO motion control of an unstable 6-DoF hexapod stage for overlay measurements
Witvoet, Gert, Kulper, Stefan, Kramer, Geerten, Baeten, MaxYear:
2017
Language:
english
DOI:
10.1109/CCTA.2017.8062548
File:
PDF, 2.71 MB
english, 2017