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[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - New parallelogram 3D-displacement sensor for micro probing and dimensional metrology
Metz, David, Dietzel, AndreasYear:
2017
Language:
english
DOI:
10.1109/TRANSDUCERS.2017.7994215
File:
PDF, 1.42 MB
english, 2017