[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Monolithic tri-axis cantilever high-shock accelerometers fabricated with a single-sided process in (111) wafers
Zou, Hongshuo, Wang, Jiachou, Chen, Fang, Bao, Haifei, Li, XinxinYear:
2017
Language:
english
DOI:
10.1109/transducers.2017.7994236
File:
PDF, 1.38 MB
english, 2017