Effects of remote hydrogen plasma on chemical bonding...

Japanese Journal of Applied Physics 2017 / 01 Vol. 56; Iss. 1S

Effects of remote hydrogen plasma on chemical bonding features and electronic states of 4H-SiC(0001) surface

Truyen, Nguyen Xuan, Ohta, Akio, Makihara, Katsunori, Ikeda, Mitsuhisa, Miyazaki, Seiichi
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Volume:
56
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.56.01AF01
Date:
January, 2017
File:
PDF, 1.02 MB
english, 2017
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