Density-functional theory molecular dynamics simulations of a-HfO 2 /a-SiO 2 /SiGe and a-HfO 2 /a-SiO 2 /Ge with a-SiO 2 and a-SiO suboxide interfacial layers
Chagarov, Evgueni A., Kavrik, Mahmut S., Fang, Ziwei, Tsai, Wilman, Kummel, Andrew C.Volume:
443
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2018.02.041
Date:
June, 2018
File:
PDF, 4.80 MB
english, 2018