The influence of atomic layer deposition process...

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Applied Surface Science 2018 / 3

The influence of atomic layer deposition process temperature on ZnO thin film structure

Boryło, P., Matus, K., Lukaszkowicz, K., Kubacki, J., Balin, K., Basiaga, M., Szindler, M., Mikuła, J.
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Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2018.03.169
Date:
March, 2018
File:
PDF, 4.10 MB
english, 2018
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