Identification of higher order silanes during monosilane pyrolysis using gas chromatography-mass spectrometry
Marie Wyller, Guro, Preston, Thomas, Klette, Hallgeir, Mongstad, Trygve, Stensrud Marstein, ErikLanguage:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2018.03.024
Date:
March, 2018
File:
PDF, 1.65 MB
english, 2018