A new process design for manufacturing sapphire wafers

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Precision Engineering 2018 / 3

A new process design for manufacturing sapphire wafers

Uhlmann, Eckart, List, Michael, Patraschkov, Marcel, Trachta, Gerd
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Language:
english
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2018.03.011
Date:
March, 2018
File:
PDF, 336 KB
english, 2018
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