Characterizing the dominant ions in low-temperature argon plasmas in the range of 1–800 Torr
Fu, Yangyang, Krek, Janez, Parsey, Guy M., Verboncoeur, John P.Volume:
25
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.5020097
Date:
March, 2018
File:
PDF, 892 KB
english, 2018