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[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung, Taiwan (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - 1MPa resistant MEMS slide valve driven by an external actuator for high power fluidic applications
Takao, Hidekuni, Takemasa, Satoshi, Terao, Kyohei, Shimokawa, FusaoYear:
2017
Language:
english
DOI:
10.1109/TRANSDUCERS.2017.7994310
File:
PDF, 1.03 MB
english, 2017