[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Room-tempearutre CO2 sensing based on interdigitated capacitors and resonant cantilevers
Kim, Choongsoon, Getz, Patrick, Kim, Min-gu, Brand, OliverYear:
2017
Language:
english
DOI:
10.1109/TRANSDUCERS.2017.7994351
File:
PDF, 1.56 MB
english, 2017