Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2018 / 05 Vol. 36; Iss. 3
Preparation of renewable antireflection moth-eye surfaces by nanoimprinting using anodic porous alumina molds
Yanagishita, Takashi, Kondo, Toshiaki, Masuda, HidekiVolume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.5016369
Date:
May, 2018
File:
PDF, 2.03 MB
english, 2018