Low-voltage coherent electron microscopy based on a highly...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2018 / 05 Vol. 36; Iss. 3

Low-voltage coherent electron microscopy based on a highly coherent electron source built from a nanoemitter

Lin, Chun-Yueh, Chang, Wei-Tse, Hsu, Wei-Hao, Chang, Mu-Tung, Chen, Yi-Sheng, Hwu, En-Te, Huang, Wun-Cin, Hwang, Ing-Shouh
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.5024852
Date:
May, 2018
File:
PDF, 4.84 MB
english, 2018
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