Micromachined integrated self-adaptive nonlinear stops for...

Journal of Micromechanics and Microengineering 2018 / 06 Vol. 28; Iss. 6

Micromachined integrated self-adaptive nonlinear stops for mechanical shock protection of MEMS

Xu, Kaisi, Jiang, Fushuai, Zhang, Wei, Hao, Yilong
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Volume:
28
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aab581
Date:
June, 2018
File:
PDF, 2.18 MB
english, 2018
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