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[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung, Taiwan (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Design method for rapid customization of MEMS sensors
Kawamura, Tetsufumi, Watanabe, Kazuki, Kamada, Yudai, Isobe, Atsushi, Hasegawa, Hiroaki, Sugii, Nobuyuki, Ryuzaki, Daisuke, Kurata, Hideaki, Nishimura, ShinjiYear:
2017
Language:
english
DOI:
10.1109/TRANSDUCERS.2017.7994490
File:
PDF, 183 KB
english, 2017