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[IEEE 2017 International Symposium on Micro-NanoMechatronics and Human Science (MHS) - Nagoya (2017.12.3-2017.12.6)] 2017 International Symposium on Micro-NanoMechatronics and Human Science (MHS) - Effect of intermitted RIE etching on the beta-PVDF film micro patterning
Miki, Sugii Ryota Hirofumi, Tsuchitani, ShigekiYear:
2017
Language:
english
DOI:
10.1109/mhs.2017.8305170
File:
PDF, 346 KB
english, 2017