Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2017 / 11 Vol. 35; Iss. 6
Positive-tone crosslinked molecular resist based on acid-catalyzed depolymerization
Sharp, Brandon L., Narcross, Hannah L., Tolbert, Laren M., Henderson, Clifford L.Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4991904
Date:
November, 2017
File:
PDF, 1.27 MB
english, 2017