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[IEEE 2017 IEEE International Conference on Advanced Intelligent Mechatronics (AIM) - Munich, Germany (2017.7.3-2017.7.7)] 2017 IEEE International Conference on Advanced Intelligent Mechatronics (AIM) - Development of high accuracy of magnetic levitation transport system for OLED evaporation process
Ha, Chang-Wan, Kim, Chang-Hyun, Lim, JaewonYear:
2017
Language:
english
DOI:
10.1109/AIM.2017.8014203
File:
PDF, 940 KB
english, 2017