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[IEEE 2017 IEEE International Ultrasonics Symposium (IUS) - Washington, DC, USA (2017.9.6-2017.9.9)] 2017 IEEE International Ultrasonics Symposium (IUS) - Temperature behavior of sound velocity of SiON thin films studied by picosecond ultrasound
Tsuboi, Seiya, Ogi, Hirotsugu, Nagakubo, Akira, Nakamura, Nobutomo, Matsuda, Satoru, Kabe, YoshiroYear:
2017
Language:
english
DOI:
10.1109/ultsym.2017.8092986
File:
PDF, 54 KB
english, 2017