Investigation of reliability of the cutoff probe by a...

Physics of Plasmas 2017 / 12 Vol. 24; Iss. 12

Investigation of reliability of the cutoff probe by a comparison with Thomson scattering in high density processing plasmas

Seo, Byonghoon, Kim, Dae-Woong, Kim, Jung-Hyung, You, Shinjae
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Volume:
24
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.4996220
Date:
December, 2017
File:
PDF, 1.39 MB
english, 2017
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