Improvement of Ohmic Contact for InAlGaN/AlN/GaN HEMTs with...

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physica status solidi (a) 2018 / 03

Improvement of Ohmic Contact for InAlGaN/AlN/GaN HEMTs with Recess Etching

Riedmüller, Sandra, Steinmann, Claudia, Grünenpütt, Jan, Scholz, Ferdinand, Blanck, Hervé
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Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201700456
Date:
March, 2018
File:
PDF, 898 KB
english, 2018
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