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Exploration of photosensitive polyimide as the modification layer in thin film microcircuit
Liu, Lily, Song, Changbin, Xue, Bin, Li, Jing, Wang, Junxi, Li, JinminVolume:
39
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/39/2/026001
Date:
February, 2018
File:
PDF, 513 KB
english, 2018