Exploration of photosensitive polyimide as the modification...

Exploration of photosensitive polyimide as the modification layer in thin film microcircuit

Liu, Lily, Song, Changbin, Xue, Bin, Li, Jing, Wang, Junxi, Li, Jinmin
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Volume:
39
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/39/2/026001
Date:
February, 2018
File:
PDF, 513 KB
english, 2018
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