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[IEEE 2017 IEEE Industry Applications Society Annual Meeting - Cincinnati, OH (2017.10.1-2017.10.5)] 2017 IEEE Industry Applications Society Annual Meeting - NOx removal performance of a wet reduction scrubber combined with oxidation by an indirect DBD plasma for semiconductor manufacturing industries
Kim, Hak-Joon, Han, Bangwoo, Woo, Chang-Gyu, Kim, Yong-JinYear:
2017
DOI:
10.1109/IAS.2017.8101682
File:
PDF, 1.01 MB
2017