Effect of deposition conditions on physical properties of...

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International Journal of Applied Glass Science 2018 / 03

Effect of deposition conditions on physical properties of sputtered silicon oxynitride thin films on float glass

Šimurka, Lukáš, Čtvrtlík, Radim, Roch, Tomáš, Turutoğlu, Tuncay, Erkan, Selen, Tomaštík, Jan, Bange, Klaus
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Language:
english
Journal:
International Journal of Applied Glass Science
DOI:
10.1111/ijag.12346
Date:
March, 2018
File:
PDF, 1.04 MB
english, 2018
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