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Impact of sublayer thickness and annealing on silicon nanostructures formation in a -Si:H/ a -SiN x :H superlattices for photovoltaics

Calta, Pavel, Šutta, Pavol, Medlín, Rostislav, Netrvalová, Marie
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Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2018.04.009
Date:
April, 2018
File:
PDF, 7.85 MB
english, 2018
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