Metrological characterization methods for confocal...

Metrological characterization methods for confocal chromatic line sensors and optical topography sensors

Seppä, Jeremias, Niemelä, Karri, Lassila, Antti
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Volume:
29
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/1361-6501/aaad2b
Date:
May, 2018
File:
PDF, 1.08 MB
english, 2018
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