Enhancement of Carrier Lifetimes in n-Type 4H-SiC Epitaxial...

Enhancement of Carrier Lifetimes in n-Type 4H-SiC Epitaxial Layers by Improved Surface Passivation

Kimoto, Tsunenobu, Nanen, Yuichiro, Hayashi, Toshihiko, Suda, Jun
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Volume:
3
Language:
english
Journal:
Applied Physics Express
DOI:
10.1143/APEX.3.121201
Date:
December, 2010
File:
PDF, 1.52 MB
english, 2010
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