Etching yields and surface reactions of amorphous carbon by...

Japanese Journal of Applied Physics 2017 / 06 Vol. 56; Iss. 6S2

Etching yields and surface reactions of amorphous carbon by fluorocarbon ion irradiation

Karahashi, Kazuhiro, Li, Hu, Yamada, Kentaro, Ito, Tomoko, Numazawa, Satoshi, Machida, Ken, Ishikawa, Kiyoshi, Hamaguchi, Satoshi
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Volume:
56
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.56.06HB09
Date:
June, 2017
File:
PDF, 1.41 MB
english, 2017
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