Rapid and damage-free outgassing of implanted helium from...

Scientific Reports 2018 / 12 Vol. 8; Iss. 1

Rapid and damage-free outgassing of implanted helium from amorphous silicon oxycarbide

Su, Qing, Ding, Hepeng, Price, Lloyd, Shao, Lin, Hinks, Jonathan A., Greaves, Graeme, Donnelly, Stephen E., Demkowicz, Michael J., Nastasi, Michael
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Volume:
8
Language:
english
Journal:
Scientific Reports
DOI:
10.1038/s41598-018-23426-y
Date:
December, 2018
File:
PDF, 1.86 MB
english, 2018
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