A Method to Fabricate Thin Micro Silicon Cantilever Based...

Key Engineering Materials 2015 / 5 Vol. 645-646

A Method to Fabricate Thin Micro Silicon Cantilever Based on Optical Lithography with AZ 1518

Tang, Chen Zhi
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Volume:
645-646
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.645-646.1093
Date:
May, 2015
File:
PDF, 461 KB
english, 2015
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