Thin SixNyCz films deposited from hexamethyldisilazane by...

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Materials Science-Poland 2017 / 12

Thin SixNyCz films deposited from hexamethyldisilazane by RF PECVD technique for optical filter applications

Oleśko, Katarzyna, Szymanowski, Hieronim, Gazicki-Lipman, Maciej, Balcerzak, Jacek, Szymański, Witold, Pawlak, Wojciech, Sobczyk-Guzenda, Anna
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Language:
english
Journal:
Materials Science-Poland
DOI:
10.1515/msp-2017-0109
Date:
December, 2017
File:
PDF, 1.40 MB
english, 2017
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